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Sputter Deposition

Sputter Deposition

Sputter Deposition¿¡ ´ëÇÑ ±ÛÀÔ´Ï´Ù. sputter / 1.3. Interactions on the target surface °¡¼ÓµÈ ¾çÀÌ¿ÂÀÌ °íüǥ¸é¿¡ Ãæµ¹Çϸé Áß¼º¿øÀÚ ¹èÃâ, ÈĹæ»ê¶õ, X¼± ¹æÃâ, ±¤ÀÚ ¹ß»ý, ÀÌÂ÷ ÀüÀÚ ¹æÃâ, ±×¸®°í target Ç¥¸é¿¡¼­ ±âü¿øÀÚÀÇ Å»Âø µîÀÌ ¹ß»ýÇϸç, target¿¡¼­´Â ºñÁ¤ÁúÈ­, ÀÌ¿ÂħÅõ, È­ÇÕ¹° Çü¼º, cascade ¹ß»ý, ±¹ºÎÀû °¡¿­, Á¡°áÇÔÀÌ »ý¼ºµÈ´Ù. ÇöóÁ¸¦ À¯ÁöÇϴµ¥ °¡Àå Áß¡¦
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[ÀÚ¿¬°úÇÐ] ½ÇÇè - Vacuum depositionÀÇ ÀÌÇØ¿Í ÁõÂø¼Óµµ¿¡ µû¸¥ ¾Ð·Â º¯È­ÃøÁ¤[¿¹ºñ]

[ÀÚ¿¬°úÇÐ] ½ÇÇè - Vacuum depositionÀÇ ÀÌÇØ¿Í ÁõÂø¼Óµµ¿¡ µû¸¥ ¾Ð·Â º¯È­ÃøÁ¤[¿¹ºñ]

[ÀÚ¿¬°úÇÐ] ½ÇÇè - Vacuum depositionÀÇ ÀÌÇØ¿Í ÁõÂø¼Óµµ¿¡ µû¸¥ ¾Ð·Â º¯È­ÃøÁ¤[¿¹ºñ] / ½ÇÇè - Vacuum depositionÀÇ ÀÌÇØ¿Í ÁõÂø¼Óµµ¿¡ µû¸¥ ¾Ð·Â º¯È­ÃøÁ¤[¿¹ºñ] 1. ½ÇÇè ¸ñÀû Áø°ø »ó¿¡¼­ÀÇ ¹°ÁúÀÇ ÁõÂøÀ» ÀÌÇØÇÏ°í, ¾Ð·Â¿¡ µû¶ó º¯È­Çϴ è¹ö ¾ÈÀÇ Áõ¹ß ºÐÀÚ·®À» °è»êÇÑ´Ù. 2. ½ÇÇè °úÁ¤ ½Ã·á ¹× ÀåÄ¡ Áغñ °úÁ¤(¸ðµç ¼¼Ã´°úÁ¤¿¡¼­´Â ¹Ýµå½Ã ÀÏȸ¿ë ºñ´Ò Àå°©À» ³¤´Ù.) 1) ±âÆÇ ¡¦
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[°øÇÐ,±â¼ú] ¹ÝµµÃ¼°øÇÐ ½ÇÇè - Metal Deposition

[°øÇÐ,±â¼ú] ¹ÝµµÃ¼°øÇÐ ½ÇÇè - Metal Deposition

[°øÇÐ,±â¼ú] ¹ÝµµÃ¼°øÇÐ ½ÇÇè - Metal Deposition / ½ÇÇè 4 : Metal Deposition 1. ½ÇÇè ¸ñÀû MOS CAPÀ» Á¦ÀÛÇÏ´Â ÀüüÀÇ °øÁ¤¿¡¼­ ¡®Dry etchingÀ» ½Ç½ÃÇÑ ÈÄ Si±âÆÇ À§¿¡ ±Ý¼ÓÀ» ÁõÂø½ÃÅ°´Â °øÁ¤ÀÎ ¡®Metal depositionÀ» ½Ç½ÃÇÏ¿© ±âÆÇÀÇ ¸éÀúÇ×À» ÃøÁ¤ÇÑ´Ù. ÁõÂø½ÃÅ°´Â ±Ý¼ÓÀ» Ni·Î ÁõÂø µÎ²²¸¦ 10nm, 20nm, 30nm·Î º¯È­¸¦ ÁÖ¾î ÁõÂø µÎ²²¸¦ Á¶Á¤ÇÔ¿¡ µû¶ó Á¦Ç°ÀÇ ¸éÀúÇ׿¡ ¾î¶² ¿µ¡¦
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¼þ½Ç´ëÇб³ ½Å¼ÒÀç°ñÇнÇÇè2 Deposition °øÁ¤ ¹× ¼ÒÀÚ Á¦ÀÛ Æò°¡ °á°úº¸°í¼­

¼þ½Ç´ëÇб³ ½Å¼ÒÀç°ñÇнÇÇè2 Deposition °øÁ¤ ¹× ¼ÒÀÚ Á¦ÀÛ Æò°¡ °á°úº¸°í¼­

¼þ½Ç´ëÇб³ ½Å¼ÒÀç°ñÇнÇÇè2 Deposition °øÁ¤ ¹× ¼ÒÀÚ Á¦ÀÛ Æò°¡ °á°úº¸°í¼­ / 1. ½ÇÇè Á¦¸ñ 2. ½ÇÇè ³¯Â¥ 3. ½ÇÇè ¸ñÀû 4. ½Ã¾à ¹× ±â±â 5. ½ÇÇè ¹æ¹ý 6. ½ÇÇè °á°ú 7. °á·Ð ¹× °íÂû / 1. ½ÇÇè Á¦¸ñ Deposition °øÁ¤ ¹× ¼ÒÀÚ Á¦ÀÛ Æò°¡ °á°úº¸°í¼­¡±ÀÌ´Ù. º» ½ÇÇè¿¡¼­´Â ´Ù¾çÇÑ ÁõÂø(Deposition) °øÁ¤À» ÅëÇØ ³ª³ë¼ÒÀ縦 ÇÕ¼ºÇÏ°í, À̵é·Î Á¦ÀÛµÈ ¼ÒÀÚÀÇ Æ¯¼ºÀ» Æò°¡Çϱâ À§ÇØ¡¦
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film deposition issue

film deposition issue

film deposition issue / 1. °øÁ¤ ¼Ò°³ 2. °øÁ¤ À̽´ / 1. °øÁ¤ ¼Ò°³ Film deposition, Áï Çʸ§ ÁõÂøÀº ´Ù¾çÇÑ »ê¾÷ ºÐ¾ß¿¡¼­ ³Î¸® È°¿ëµÇ´Â °øÁ¤À¸·Î, ÁÖ·Î ¹ÝµµÃ¼ Á¦Á¶, ¿ÉÅäÀÏ·ºÆ®·Î´Ð½º, ÄÚÆà ±â¼ú µî¿¡¼­ Áß¿äÇÑ ¿ªÇÒÀ» ÇÑ´Ù. ÀÌ °úÁ¤Àº ±âÆÇ À§¿¡ ¾ãÀº Çʸ§À» Çü¼ºÇÏ´Â °ÍÀ¸·Î, ÀÌ·¯ÇÑ Çʸ§Àº Àü±âÀû, ±¤ÇÐÀû ¶Ç´Â ±â°èÀû Ư¼ºÀ» ºÎ¿©ÇÏ´Â µ¥ ±â¿©ÇÑ´Ù. Çʸ§ ÁõÂøÀÇ ÁÖ¿ä ¸ñÀû¡¦
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[¹ÝµµÃ¼°øÁ¤½ÇÇè]Cleaning , Oxidation, Photolithography, Dry etching, Metal Deposition, Annealing(Silcidation)

[¹ÝµµÃ¼°øÁ¤½ÇÇè]Cleaning , Oxidation, Photolithography, Dry etching, Metal Deposition, Annealing(Silcidation)

[¹ÝµµÃ¼°øÁ¤½ÇÇè]Cleaning , Oxidation, Photolithography, Dry etching, Metal Deposition, Annealing(Silcidation) / 1. ½ÇÇè ¸ñÀû 2. ½ÇÇè ¹æ¹ý 3. ½ÇÇè °á°ú 4. ÅäÀÇ »çÇ× II.Photolithography / 1. ½ÇÇè ¸ñÀû 2. ½ÇÇè ÀÌ·Ð ¹× ¿ø¸® 3. ½ÇÇè ¹æ¹ý 4. ½ÇÇè °á°ú 5. ÅäÀÇ »çÇ× III.Dry etching
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[¹ÝµµÃ¼°øÁ¤½ÇÇè]Cleaning , Oxidation, Photolithography, Dry Etching, Metal Deposition

[¹ÝµµÃ¼°øÁ¤½ÇÇè]Cleaning , Oxidation, Photolithography, Dry Etching, Metal Deposition

[¹ÝµµÃ¼°øÁ¤½ÇÇè]Cleaning , Oxidation, Photolithography, Dry Etching, Metal Deposition / 1) ½ÇÇè ¸ñÀû 2) ½ÇÇè ÀÌ·Ð ¹× ¿ø¸® 3) ½ÇÇè ¹æ¹ý 4) ½ÇÇè °á°ú 5) ÅäÀÇ »çÇ× 2. Photolithography /
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¼þ½Ç´ëÇб³ ½Å¼ÒÀç°ñÇнÇÇè2 Deposition °øÁ¤ ¹× ¼ÒÀÚ Á¦ÀÛ Æò°¡ °á°úº¸°í¼­

¼þ½Ç´ëÇб³ ½Å¼ÒÀç°ñÇнÇÇè2 Deposition °øÁ¤ ¹× ¼ÒÀÚ Á¦ÀÛ Æò°¡ °á°úº¸°í¼­

¼þ½Ç´ëÇб³ ½Å¼ÒÀç°ñÇнÇÇè2 Deposition °øÁ¤ ¹× ¼ÒÀÚ Á¦ÀÛ Æò°¡ °á°úº¸°í¼­ / 1. ½ÇÇè Á¦¸ñ 2. ½ÇÇè ³¯Â¥ 3. ½ÇÇè ¸ñÀû 4. ½Ã¾à ¹× ±â±â 5. ½ÇÇè ¹æ¹ý 6. ½ÇÇè °á°ú 7. °á·Ð ¹× °íÂû / 1. ½ÇÇè Á¦¸ñ ¼þ½Ç´ëÇб³ ½Å¼ÒÀç°ñÇнÇÇè2ÀÇ `Deposition °øÁ¤ ¹× ¼ÒÀÚ Á¦ÀÛ` ½ÇÇèÀº Çö´ë ÀüÀÚ¼ÒÀÚÀÇ Á¦ÀÛ °úÁ¤¿¡¼­ ÇʼöÀûÀ¸·Î ¼öÇàµÇ´Â ÁõÂø ±â¼úÀÇ ÀÌÇØ¿Í ÀÀ¿ëÀ» ¸ñÇ¥·Î ÇÑ´Ù. ÀÌ ½ÇÇ衦
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¼¼¶ó¹Í °øÇÐ ½ÇÇè º¸°í¼­ (Pulsed laser deposition of oxide thin films and their analysis)

¼¼¶ó¹Í °øÇÐ ½ÇÇè º¸°í¼­ (Pulsed laser deposition of oxide thin films and their analysis)

¼¼¶ó¹Í °øÇÐ ½ÇÇè º¸°í¼­ (Pulsed laser deposition of oxide thin films and their analysis) / 1. ºÐ¼®ÀÚ·á 2. Report(¼öÁ¤º»).docx / 1. ºÐ¼®ÀÚ·á Pulsed laser deposition (PLD)¿¡¼­ »êÈ­¹° ¹Ú¸·ÀÇ ºÐ¼®ÀÚ·á´Â ´Ù¾çÇÑ ¹°¸®Àû, È­ÇÐÀû ¼ºÁúÀ» Æò°¡ÇÏ´Â µ¥ Áß¿äÇÑ ¿ªÇÒÀ» ÇÑ´Ù. PLD´Â ±Ý¼Ó ¹× »êÈ­¹° Ç¥¸é¿¡ ·¹ÀÌÀú ÆÞ½º¸¦ ÀÌ¿ëÇØ ÇöóÁ¸¦ »ý¼ºÇÏ°í, ÀÌ ÇöóÁ¿¡¼­ ¹æÃâµÈ ¿ø¡¦
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Laser Ablation of a Graphite Target in a N2 Atmosphere and Pulsed Laser Deposition °á°ú

Laser Ablation of a Graphite Target in a N2 Atmosphere and Pulsed Laser Deposition °á°ú

Laser Ablation of a Graphite Target in a N2 Atmosphere and Pulsed Laser Deposition °á°ú / 1. °á°ú (1) ù ¹ø° ±Ý¼Ó (2) µÎ ¹ø° ±Ý¼Ó (3) ¼¼ ¹ø° ±Ý¼Ó 2. Discussion / 1. °á°ú ·¹ÀÌÀú ¾îºí·¹À̼ÇÀ» ÅëÇØ ±×·¡ÆÄÀÌÆ® Ÿ°Ù¿¡¼­ ³ªÀÌÆ®·Î°Õ(N ºÐÀ§±â¿¡¼­ ¹ß»ýÇÑ °á°ú´Â ¿©·¯ °¡Áö Èï¹Ì·Î¿î Ư¼º°ú Çö»óÀ» µå·¯³½´Ù. ½ÃÆí ºÐ¼® °á°ú, ¾îºí·¹ÀÌ¼ÇµÈ ±×·¡ÆÄÀÌÆ® Ÿ°ÙÀÇ Ç¥¸éÀº¡¦
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