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[¹°¸®ÀüÀÚ2] °úÁ¦2 ´Ü¿ø ¿ä¾à Fabrication of pn junctions / 1. Thermal Oxidation 2. Diffusion 3. Rapid Thermal Processing 4. Ion Implantation 5. Chemical Vapor Deposition (CVD) 6. hotolithography 7. Stepper 8. Lmin&DOF 9. Chemical Mechanical Polishing (CMP) 10. Plasmas 11. Etching 12. Metallization 13. Identification of source of data / 1. Therm¡¦ |
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[¹°¸®ÀüÀÚ2] °úÁ¦2 ´Ü¿ø ¿ä¾à Fabrication of pn junctions / 1. Thermal Oxidation 2. Diffusion 3. Rapid Thermal Processing 4. Ion Implantation 5. Chemical Vapor Deposition (CVD) 6. hotolithography 7. Stepper 8. Lmin&DOF 9. Chemical Mechanical Polishing (CMP) 10. Plasmas 11. Etching 12. Metallization 13. Identification of source of data / 1. Therm¡¦ |
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