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1. �떎�뿕 紐⑹쟻
�떎�뿕�쓽 紐⑹쟻��� SiO2(�씠�궛�솕洹쒖냼) �뻼��� 留됱쓽 �뙣�꽣�떇 諛� 泥섎━瑜� �넻�빐 洹� �듅�꽦怨� �쓳�슜 媛��뒫�꽦�쓣 �젣怨좏븯�뒗 寃껋씠�떎. SiO2 �뻼��� 留됱�� 諛섎룄泥�, 愿묒쟾�옄 諛� �굹�끂湲곗닠 遺꾩빞�뿉�꽌 留롮�� �쓳�슜�쓣 媛�吏�怨� �엳�쑝硫�, �듅�엳 �젅�뿰泥대줈�꽌�쓽 �뿭�븷�씠 以묒슂�븯�떎. �씠 �떎�뿕�뿉�꽌�뒗 �떎�뼇�븳 �젣議� 怨듭젙�쓣 �넻�빐 SiO2 �뻼��� 留됱쓣 �꽦�옣�떆�궎怨�, �씠�썑�뿉 �냼�젙�쓽 �뙣�꽩�쓣 �삎�꽦�븯�뒗 怨쇱젙�쓣 �넻�빐 �슂援щ릺�뒗 �쟾湲곗쟻 諛� 臾쇰━�쟻 �듅�꽦�쓣 媛�吏��뒗 留됱쓣 �젣�옉�븷 �삁�젙�씠�떎. 泥レ㎏, SiO2 �뻼��� 留됱쓣 �삎�꽦�븯湲� �쐞�븳 怨듭젙�쑝濡쒕뒗 �솕�븰 利앹갑(CVD) 諛⑸쾿�쓣 �궗�슜�븳�떎. �씠 諛⑸쾿��� �넂��� �뭹吏덉쓽 SiO2 留됱쓣 洹좎씪�븯寃� �꽦�옣�떆�궗 �닔 �엳�쑝硫�, �떎�뼇�븳 �몢猿� 議곗젅�씠 媛��뒫�븯�떎�뒗 �옣�젏�씠 �엳�떎. �씠瑜� �넻�빐 �뻼��� 留됱쓽 �몢猿섏�� 洹좎씪�꽦�쓣 議곗젅�븯�뿬 理쒖쟻�쓽 �꽦�뒫�쓣 諛쒗쐶�븷 �닔 �엳�뒗 湲곕컲�쓣 留덈젴�븯�뒗 寃껋씠 紐⑺몴�씠�떎. SiO2 留됱�� 湲고뙋�쓽 醫낅쪟�뿉 �뵲�씪 洹� �듅�꽦�씠 �떖�씪吏� �닔 �엳�쑝誘�濡�, �떎�뼇�븳 湲고뙋�뿉�꽌�쓽 �꽦�뒫�쓣 鍮꾧탳 遺꾩꽍�븯�뿬 媛��옣 �쟻�빀�븳 湲고뙋�쓣 �꽑�젙�븷 寃껋씠�떎. �몮吏�, �듅�젙 �뙣�꽩�쓣 �삎�꽦�븯湲� �쐞�빐 �룷�넗由ъ냼洹몃옒�뵾 諛� �떇媛� 怨듭젙�쓣 �솢�슜�븳�떎. �룷�넗由ъ냼洹몃옒�뵾�뒗 �뙣�꽩�쓣 SiO2 �뻼��� 留됱뿉 �쟾�궗�븯�뒗 怨쇱젙�쑝濡�, �씠�뒗 �떆猷뚯쓽 �젙諛��꽦怨� 蹂듭옟�꽦�쓣 寃곗젙吏볥뒗 以묒슂�븳 �떒怨꾩씠�떎. �씠�븣, �떎�뼇�븳 留덉뒪�겕��� �젅吏��뒪�듃瑜� �솢�슜�븯�뿬 蹂듭옟�븳 �굹�끂 援ъ“瑜� 援ы쁽�븯�뒗 寃껋씠 紐⑺몴�씠�떎. 理쒖쥌�쟻�쑝濡� �씠 �뙣�꽩�솕�맂 SiO2 �뻼��� 留됱�� �쟾�옄�쟻, 愿묓븰�쟻 �꽦吏덉쓣 洹밸���솕�븷 �닔 �엳�뒗 媛��뒫�꽦�쓣 �궡�룷�븯怨� �엳�떎. �뀑吏�, �뙣�꽣�떇 �썑 �썑泥섎━ 怨듭젙�쓣 �넻�빐 SiO2 �뻼��� 留됱쓽 �븞�젙�꽦怨� �듅�꽦�쓣 �뼢�긽�떆�궎�뒗 �뜲 以묒젏�쓣 �몦�떎. �뿴泥섎━, �뵆�씪利덈쭏 泥섎━ �벑 �떎�뼇�븳 �썑泥섎━ 怨듭젙�쓣 �쟻�슜�븯�뿬 SiO2 留됱쓽 寃곗젙援ъ“��� �몴硫� �듅�꽦�쓣 媛쒖꽑�븷 寃껋씠�떎. �씠�윭�븳 �썑泥섎━ 怨쇱젙�쓣 �넻�빐 �뻼��� 留됱쓽 �쟾湲곗쟻 �듅�꽦�쓣 �뼢�긽�떆�궎怨�, �궡援ъ꽦�쓣 利앷���떆�궎�뒗 寃껋쓣 紐⑺몴濡� �븳�떎. �씠��� 媛숈�� �뿰援щ�� �넻�빐 SiO2 �뻼��� 留됱쓽 ���媛� �젣議� 諛� ����웾 �깮�궛�씠 媛��뒫�빐吏�怨�, �떎�뼇�븳 �쟾�옄湲곌린�뿉�꽌 SiO2 留됱쓽 �쓳�슜 �솗�옣�쓣 湲곕���븷 �닔 �엳�떎. �씠�윭�븳 �뿰援� 寃곌낵�뒗 怨좎꽦�뒫 諛섎룄泥� �냼�옄�쓽 媛�
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Patterning and treatment of SiO2 thin films �삁鍮꾨낫怨좎꽌 ~.hwp
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