|
�떎�뿕: Dry etching
1. �떎�뿕 紐⑹쟻
MOS CAP�쓣 �젣�옉�븯�뒗 �쟾泥댁쓽 怨듭젙�뿉�꽌 ��쁏hotolithography��� 怨듭젙�쓣 �떎�떆�븳 �썑 Si湲고뙋�쓣
�뵆�씪利덈쭏瑜� �씠�슜�븯�뿬 �떇媛곹븯�뒗 怨듭젙�씤 ��쁃ry etching��숈쓣 �떎�떆�븯硫� FE-SEM�쓣 �씠�슜�븯�뿬
SiO2 inspection�쓣 痢≪젙�븳�떎. �씠踰� �떎�뿕�뿉�꽌 �쟾�썝�쓽 �꽭湲곕�� 300����듃濡� �뿉移� �떆媛꾩쓣
3min, 5min, 7min�쑝濡� 蹂��솕瑜� 二쇱뼱 �뿉移� �떆媛꾩쓣 議곗젙�븿�뿉 �뵲�씪 �젣�뭹�쓽 SiO2 inspection�씠
�뼱�뼡 �쁺�뼢�쓣 諛쏅뒗吏� �솗�씤�븯怨좎옄 �븳�떎.
2. �떎�뿕 諛⑸쾿
媛�. �떎�뿕 蹂��닔
�쟾�썝�쓽 �꽭湲�
�떇媛� �떆媛�
�굹癒몄�� 蹂��씤
300 W
3 min
紐⑤몢 �룞�씪
5 min
7 min
�굹. �떎�뿕 以�鍮꾨Ъ
Dry etcher, FE-SEM, ICP, Si wafer �떆猷�
�떎. �떎�뿕 怨쇱젙
1) Cleaning, Oxidation, Photolithography 怨듭젙�쓣 留덉튇 wafer �떆猷뚮�� 以�鍮꾪븳�떎.
2) �떆猷뚯쓽 �몴硫댁쓣 FESEM�쑝濡� 李띿�� �썑 �몴硫댁쓽 媛먭킅�젣 紐⑦삎�씤 留덉뒪�겕 �뙣�꽩�쓣 �솗�씤�븳�떎.
(�떇媛� �쟾 �뙣�꽩 �궗�씠利� 痢≪젙)
3) ICP �옣鍮꾩쓽 諛섏쓳 Chamber�뿉 �떆猷뚮�� �꽔�뒗�떎.
4) Chamber瑜� ���湲곗븬 蹂대떎 �궙��� 吏꾧났(10 Torr �씠�븯)�쑝濡� 留뚮뱺�떎.
5) Chamber�뿉 Oxygen gas瑜� 二쇱엯�븳�떎.
6) Chamber�뿉 Plasma gas濡� C F gas(�솕�븰�쟻 諛섏쓳 �빞湲�)���
Ar gas(臾쇰━�쟻 諛섏쓳 �빞湲�)瑜� 二쇱엯�븳�떎.
7) �쟾�썝�옣移섎�� �씠�슜�븯�뿬 300W�쓽 �쟾�썝�쓣 怨듦툒�븳�떎.
8) 3媛�吏� �떆猷뚯뿉 媛곴컖 3遺�, 5遺�, 7遺� �뵫 �뿉移��븯�뒗 怨쇱젙�쓣 諛섎났�븳�떎.
9) FE-SEM�쓣 �씠�슜�븯�뿬 �떆猷뚮뱾�쓽 SiO2 inspection�쓣 痢≪젙�븯怨� �떇媛� �쟾怨� 鍮꾧탳�븳�떎.
(�떇媛� �썑 �뙣�꽩 �궗�씠利� 痢≪젙)
3. 寃곌낵 諛� 怨좎같
議곗궗�븯硫댁꽌 �씪�떒 �븘�뒗嫄� �떎 �뜥遊ㅻ뒗�뜲 �옒紐삳맂嫄곕굹 異붽���븯怨� �떢�쑝�떊嫄� �엳�쑝硫� 諛붾줈諛붾줈 留먯���빐二쇱떆硫� 怨좎튌寃뚯슂. 洹몃━怨� 沅곴툑�븳寃� etch rate媛� �떆媛꾩씠 吏��궇�닔濡� �뼥�뼱吏��뒗寃� 留욌뒗嫄댁���옉���(�깮�왂)
|
![[怨듯븰,湲곗닠] 諛섎룄泥닿났�젙 �떎�뿕 - Dry etching (1 페이지)](/View/[怨듯븰,湲곗닠] 諛섎룄泥닿났�젙 �떎�뿕 - Dry etching_docx_01_.gif "[怨듯븰,湲곗닠] 諛섎룄泥닿났�젙 �떎�뿕 - Dry etching (1 페이지)")
![[怨듯븰,湲곗닠] 諛섎룄泥닿났�젙 �떎�뿕 - Dry etching (2 페이지)](/View/[怨듯븰,湲곗닠] 諛섎룄泥닿났�젙 �떎�뿕 - Dry etching_docx_02_.gif "[怨듯븰,湲곗닠] 諛섎룄泥닿났�젙 �떎�뿕 - Dry etching (2 페이지)")
![[怨듯븰,湲곗닠] 諛섎룄泥닿났�젙 �떎�뿕 - Dry etching (3 페이지)](/View/[怨듯븰,湲곗닠] 諛섎룄泥닿났�젙 �떎�뿕 - Dry etching_docx_03_.gif "[怨듯븰,湲곗닠] 諛섎룄泥닿났�젙 �떎�뿕 - Dry etching (3 페이지)")
![[怨듯븰,湲곗닠] 諛섎룄泥닿났�젙 �떎�뿕 - Dry etching (4 페이지)](/View/[怨듯븰,湲곗닠] 諛섎룄泥닿났�젙 �떎�뿕 - Dry etching_docx_04_.gif "[怨듯븰,湲곗닠] 諛섎룄泥닿났�젙 �떎�뿕 - Dry etching (4 페이지)")
![[怨듯븰,湲곗닠] 諛섎룄泥닿났�젙 �떎�뿕 - Dry etching (5 페이지)](/View/[怨듯븰,湲곗닠] 諛섎룄泥닿났�젙 �떎�뿕 - Dry etching_docx_05_.gif "[怨듯븰,湲곗닠] 諛섎룄泥닿났�젙 �떎�뿕 - Dry etching (5 페이지)")
![[怨듯븰,湲곗닠] 諛섎룄泥닿났�젙 �떎�뿕 - Dry etching (6 페이지)](/View/[怨듯븰,湲곗닠] 諛섎룄泥닿났�젙 �떎�뿕 - Dry etching_docx_06_.gif "[怨듯븰,湲곗닠] 諛섎룄泥닿났�젙 �떎�뿕 - Dry etching (6 페이지)")
![[怨듯븰,湲곗닠] 諛섎룄泥닿났�젙 �떎�뿕 - Dry etching (7 페이지)](/View/[怨듯븰,湲곗닠] 諛섎룄泥닿났�젙 �떎�뿕 - Dry etching_docx_07_.gif "[怨듯븰,湲곗닠] 諛섎룄泥닿났�젙 �떎�뿕 - Dry etching (7 페이지)")
![[怨듯븰,湲곗닠] 諛섎룄泥닿났�젙 �떎�뿕 - Dry etching (1 페이지)](/View/[怨듯븰,湲곗닠] 諛섎룄泥닿났�젙 �떎�뿕 - Dry etching_docx_01.gif "[怨듯븰,湲곗닠] 諛섎룄泥닿났�젙 �떎�뿕 - Dry etching (1 페이지)")
![[怨듯븰,湲곗닠] 諛섎룄泥닿났�젙 �떎�뿕 - Dry etching (2 페이지)](/View/[怨듯븰,湲곗닠] 諛섎룄泥닿났�젙 �떎�뿕 - Dry etching_docx_02.gif "[怨듯븰,湲곗닠] 諛섎룄泥닿났�젙 �떎�뿕 - Dry etching (2 페이지)")
![[怨듯븰,湲곗닠] 諛섎룄泥닿났�젙 �떎�뿕 - Dry etching (3 페이지)](/View/[怨듯븰,湲곗닠] 諛섎룄泥닿났�젙 �떎�뿕 - Dry etching_docx_03.gif "[怨듯븰,湲곗닠] 諛섎룄泥닿났�젙 �떎�뿕 - Dry etching (3 페이지)")
![[怨듯븰,湲곗닠] 諛섎룄泥닿났�젙 �떎�뿕 - Dry etching (4 페이지)](/View/[怨듯븰,湲곗닠] 諛섎룄泥닿났�젙 �떎�뿕 - Dry etching_docx_04.gif "[怨듯븰,湲곗닠] 諛섎룄泥닿났�젙 �떎�뿕 - Dry etching (4 페이지)")
![[怨듯븰,湲곗닠] 諛섎룄泥닿났�젙 �떎�뿕 - Dry etching (5 페이지)](/View/[怨듯븰,湲곗닠] 諛섎룄泥닿났�젙 �떎�뿕 - Dry etching_docx_05.gif "[怨듯븰,湲곗닠] 諛섎룄泥닿났�젙 �떎�뿕 - Dry etching (5 페이지)")
![[怨듯븰,湲곗닠] 諛섎룄泥닿났�젙 �떎�뿕 - Dry etching (6 페이지)](/View/[怨듯븰,湲곗닠] 諛섎룄泥닿났�젙 �떎�뿕 - Dry etching_docx_06.gif "[怨듯븰,湲곗닠] 諛섎룄泥닿났�젙 �떎�뿕 - Dry etching (6 페이지)")
![[怨듯븰,湲곗닠] 諛섎룄泥닿났�젙 �떎�뿕 - Dry etching (7 페이지)](/View/[怨듯븰,湲곗닠] 諛섎룄泥닿났�젙 �떎�뿕 - Dry etching_docx_07.gif "[怨듯븰,湲곗닠] 諛섎룄泥닿났�젙 �떎�뿕 - Dry etching (7 페이지)")
인 쇄
바로가기
[怨듯븰,湲곗닠] 諛섎룄泥닿났�젙 �떎�뿕 - Dry etching.docx
[Size :
536 Kbyte
]
장바구니
