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�떎�뿕 1 : Cleaning & Oxidation
1. �떎�뿕 紐⑹쟻
MOS CAP�쓣 �젣�옉�븯�뒗 �쟾泥댁쓽 怨듭젙�뿉�꽌 泥� 踰덉㎏ 怨듭젙�뿉 �빐�떦�븯�뒗 ��쁗afer cleaning & Oxidation��� 怨듭젙�쓣 �떎�떆�븳�떎. �궛�솕 �삩�룄瑜� 怨좎젙�븯怨� �궛�솕 �떆媛꾩쓣 議곗젙 �븯����쓣 �븣 Oxide 痢듭쓽 �몢猿� 蹂��솕�뿉 �뼱�뼡 �쁺�뼢�쓣 二쇰뒗吏� �솗�씤�븯�뿬蹂몃떎.
2. �떎�뿕 諛⑸쾿
媛�. �떎�뿕 蹂��닔
Wafer
Oxidation temperature
Oxidation time
Si (100)
p-type, 1~10 廓cm
1000�꼦
2 hours
4 hours
6 hours
�굹. �떎�뿕 以�鍮꾨Ъ
BOE, DI water, Tweezer, Teflon beakers, Safety gadgets, Tube furnace, ellipsometer,
Si(100) wafer:p-type �떆猷�
�떎. �떎�뿕 怨쇱젙
1) BOE(Buffered Oxide Etchants) �슜�븸�쓣 �씠�슜�븯�뿬 湲곗〈�뿉 議댁옱�븯�뒗 Oxide痢듦낵 Wafer�쓽
�몴硫� �쑀湲곕Ъ, �씠�삩, 湲덉냽 臾쇱쭏�쓣 �솕�븰�쟻�쑝濡� �젣嫄고븳�떎.( :怨꾨㈃�솢�꽦�젣)
- Wafer瑜� BOE �슜�븸(NH4F:H2O:怨꾨㈃�솢�꽦�젣)�뿉 30遺� �룞�븞 �떞洹쇰떎.
2) QDR (Quick Drain Rinse)
- DI �슜�븸�쓣 �씠�슜�븯�뿬 �뿹援곕떎.
3) Spin Dryer
- 30遺� �룞�븞 700rpm �냽�룄濡� �쉶�쟾�떆耳� Wafer �몴硫댁쓽 臾쇨린瑜� �셿�쟾�엳 �젣嫄고븳�떎.
4) �꽭�젙 �슜�븸�쓽 �썾�씠�띁 �몴硫� 遺�李� �긽�깭 �솗�씤
- 臾쇰갑�슱�쓣 �뼥�뼱�쑉�젮 �몴硫닿낵�쓽 媛곷룄瑜� 痢≪젙�븳 �썑 BOE cleaning�쟾�뿉 痢≪젙�븳 媛곷룄���
鍮꾧탳�븳�떎. �씠 �븣 �꽭�젙�릺�뒗 �몴硫댁쓽 �듅�꽦�씠 移쒖닔�꽦(hydroph���(�깮�왂)
5) Wet oxidation
6) Ellipsometer�쓣 �씠�슜�븯�뿬 痢듭쓽 thickness瑜� 痢≪젙�븳�떎.
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