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Semiconductor-Grade Silicon
Table 4.1
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Crystal seed
Molten polysilicon
Heat shield
Water jacket
Single crystal silicon
Quartz crucible
Carbon heating element
Crystal puller and rotation mechanism
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8) Develop inspect
5) Post-exposure
bake
6) Develop
7) Hard bake
UV Light
Mask
4) Alignment
and Exposure
Resist
2) Spin coat
3) Soft bake
1) Vapor prime
HMDS
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Substrate
Film
Resist
Resist
Substrate
Film
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CVD ÀÌ¿ë// PVDÀÌ¿ë
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Upper polishing pad
Lower polishing pad
Wafer
Slurry
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Used with permission from Advanced Micro Devices
Oxidation
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