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1. �떎�뿕紐⑹쟻
- Pumping System�쓽 �옉�룞 �썝由щ�� �븣�븘 蹂몃떎.
2. �떎�뿕 �옣鍮� 紐⑥뒿
媛꾨떒�븯寃� 袁몃�� pumping system
���吏꾧났�럩�봽(濡쒗꽣由� �럩�봽) 怨좎쭊怨듯럩�봽(�꽣蹂댄럩�봽)
3. �옉�룞 �썝由�
�떎�뿕�떎�뿉�꽌 �궗�슜�븯�뒗 怨좎쭊怨� �럩�봽�쓽 醫낅쪟�뿉�뒗 Turbo Pump, Cryo Pump, Diffusion Pump 3媛�吏�媛� �엳�떎.
Pumping System�뿉�꽌 湲곕낯 �쟻�쑝濡� �븘�슂�븳 �옣鍮꾨뱾��� ���吏꾧났Pump��� 怨좎쭊怨킦ump 洹몃━怨� 4媛쒖쓽 踰⑤툕�떒�씠 �븘�슂�븯�떎. Pumping System洹몃┝�뿉 蹂댁씠�뒗 4媛쒖쓽 踰⑤툕�뒗 紐⑤몢 �닔�룞�씠�떎.
濡쒗꽣由� Pump瑜� �옉�룞�떆�궎硫� 吏꾧났�룄媛� �뼥�뼱吏�寃� �맂�떎.
吏꾧났�룄媛� �뼥�뼱吏�怨� �엳�뒗 紐⑥뒿(�븘�옒 �쐞濡� ���吏꾧났 寃뚯씠吏� �몢 媛쒓�� �몴�떆�맂�떎.)
寃뚯씠吏�
- 洹몃┝�뿉�꽌 �쐵履쎌뿉 �몴�떆�맂 ���吏꾧났 寃뚯씠吏� : 而댄뙥�듃�윴 寃뚯씠吏�1 (Pump吏꾧났�씠 �뼹留덈굹 鍮좎���굹瑜� 痢≪젙�븯�뒗 寃뚯씠吏�)
- 洹몃┝�뿉�꽌 �븘�옒履쎌뿉 �몴�떆�맂 ���吏꾧났 寃뚯씠吏� : 而댄뙥�듃�윴 寃뚯씠吏�2 (Chamber吏꾧났�쓣 �솗�씤�븯�뒗)
�씠 寃뚯씠吏��뒗 �윭�븨諛몃툕瑜� 吏��궃 �썑 �뿰寃곕릺�뼱 �엳�떎. Pump��� Chamber �몢 怨녹쓽 吏꾧났�쓣 紐⑤몢 �솗�씤 �빐�빞 �븳�떎.
濡쒗꽣由� �럩�봽瑜� �옉�룞�떆�궗 �븣 �꽭 媛쒖쓽 諛몃툕�뒗 紐⑤몢 �옞寃� �엳�뒗 �긽�깭�씠�떎.
1) Pump�쓽 �옉�룞
Chamber�궡 ���吏꾧났�쓣 留뚮뱾湲� �쐞�빐 �젣�씪 泥섏쓬 �뿴�뼱�빞�븷 諛몃툕�뒗 �윭�븨 諛몃툕�씠�떎.
�꽣蹂� �럩�봽�뒗 硫붿씤 諛몃툕瑜� �뿴�뼱�빞 Pumping�쓣 �븯寃� �릺�뼱 �엳�떎. (�쐞�쓽 �몢 媛�吏�媛� �굹�닠�졇 �엳�뒗 �씠�쑀�뒗 ���吏꾧났Pump��� 怨좎쭊怨� Pump媛� �굹�닠�졇 �엳湲� �븣臾몄씠�떎.) �윭�븨 諛몃툕瑜� �뿴寃� �릺硫� Pump System �궡�뿉 怨듦린媛� 梨꾩썙�졇 �엳�쑝誘�濡� 而댄뙥�듃�윴 寃뚯씠吏�媛� �떎�떆 利앷���븯寃� �맂�떎. �씠寃껋�� Chamber�궡�뿉 怨듦린媛� 鍮좎��怨� �엳�떎�뒗 寃껋씠�떎.
而댄뙥�듃�윴 寃뚯씠吏�1���(�깮�왂)
2) �럩�봽瑜� �걣 �븣
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