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MEMS의 기초 (Foundations of MEMS , Chang Liu) 연습문제 솔루션

등록일 : 2011-12-31
갱신일 : 2011-12-31


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[솔루션] MEMS의 기초(Foundations of MEMS, Chang Liu) 연습문제 솔루션 입니다.

총 1장부터 16장 까지 있습니다!

공부 할 때 정말 도움이 많이 됬던 자료 입니다. 수업을 따라가면서 이해 안가는 부분이 있으면 체크 하는 방식도 괜찮으며, 또 수업이 들은지 오래되어 다시 공부하고자 할때 도움이 되는 솔루션입니다..^^
그리고 시험기간에는 정말 없어서는 안될 자료이기도 하구요..^^

SOLCpt01 Introduction

SOLCpt02 IntroFab

SOLCpt03E lecMechConcepts

SOLCpt04E lectrostatic

SOLCpt05 Thermal

SOLCpt06 Piezoresistive

SOLCpt07 Piezoelectric

SOLCpt08 Magnetic

SOLCpt09- Summary

SOLCpt10 FabBulk

SOLCpt11- 5FabSurface

SOLCpt12- 5PolymerMEMS

SOLCpt13- 2Fluidic

SOLCpt14-5 SPM

SOLCpt15-4O pticalMirror

SOLCpt16 ProcessIntegration

으로 구성 되어있습니다.

그리고 1장의 한 부분을 발췌하면!(설계 부분에서는 수식이 나오나 여기서 나타내기에는 제한이 있으므로 책과 맞는지 확인하고 받으시길 바랍니다..^^)

Problems
Problem 1: Review
Read the following sections in the paper titled silicon as a mechanical material by Kurt
Petersen: Sections I, II, IV, VI, VIII [10]. The paper can be found in the library or on-line.
Problem 2: Review
Locate the following MEMS-specific journals and conference proceedings in your library or online:
(1) Sensors and Actuators (S&A); (2) Proceedings of IEEE Annual International Workshop
on Micro Electro Mechanical Systems (the name was changed to IEEE International Conference
on Micro Electro Mechanical Systems since 2002); (3) IEEE/ASME Journal of
Microelectromechanical Systems; and (4) Journal of Micromechanics and Microengineering.
Papers from these journals and proceedings are important for readers to gain further breadth and
depth of knowledge in the MEMS area beyond the coverage of this textbook. Therefore it is
important to be able to locate these sources.
Identify one particular area of MEMS application of interest to you and then identify five papers
from these sources of literatures. The papers must come from at least two different sources. Of
the five papers, the dates of publication should span at least five years.
Write a two-page, single-spaced summary to compare the contents of these five papers.
Summarize the five references in the following format: authors, title, publication source,
issue/volume number, page number, and year. Subsequently, make cross-comparison of
technical elements of these five papers, and explain how these works are related to one another.
You may compare the specifications and/or fabrication technology, and/or fabrication
complexity of these five reported devices. Optionally, you may compare MEMS with other
competing technologies in terms of performance, cost, reliability, and customization.

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